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  • Autor
    • Teixeira dos Santos, Tiago Filipe
    • Schrunner, Stefan
    • Geiger, Bernhard
    • Pfeiler, Olivia
    • Zernig, Anja
    • Kaestner, Andre
    • Kern, Roman
  • TitelFeature Extraction From Analog Wafermaps: A Comparison of Classical Image Processing and a Deep Generative Model
  • Datei
  • DOI10.1109/TSM.2019.2911061
  • Persistent Identifier
  • Erschienen inIEEE transactions on semiconductor manufacturing
  • Band32
  • Erscheinungsjahr2019
  • Heft2
  • Seiten190-198
  • LicenceCC-BY
  • ZugriffsrechteCC-BY
  • Download Statistik579
  • Peer ReviewJa
  • AbstractSemiconductor manufacturing is a highly innovative branch of industry, where a high degree of automation has already been achieved. For example, devices tested to be outside of their specifications in electrical wafer test are automatically scrapped. In this work, we go one step further and analyse test data of devices still within the limits of the specification, by exploiting the information contained in the analog wafermaps. To that end, we propose two feature extraction approaches with the aim to detect patterns in the wafer test dataset. Such patterns might indicate the onset of critical deviations in the production process. The studied approaches are: (A) classical image processing and restoration techniques in combination with sophisticated feature engineering and (B) a data-driven deep generative model. The two approaches are evaluated on both a synthetic and a real-world dataset. The synthetic dataset has been modelled based on real-world patterns and characteristics. We found both approaches to provide similar overall evaluation metrics. Our in-depth analysis helps to choose one approach over the other depending on data availability as a major aspect, as well as on available computing power and required interpretability of the results.