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  • Autor
    • Perrotta, Alberto
    • Pilz, Julian
    • Pachmajer, Stefan
    • Milella, Antonella
    • Coclite, Anna Maria
  • TitelOn the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition
  • Datei
  • DOI10.3762/bjnano.10.74
  • Persistent Identifier
  • Erschienen inBeilstein Journal of Nanotechnology
  • Band10
  • Erscheinungsjahr2019
  • Seiten746-759
  • LicenceCC BY
  • ISSN2190-4286
  • ZugriffsrechteCC-BY
  • Download Statistik217
  • Peer ReviewJa
  • AbstractThe synthesis of nanoporous ZnO thin films is achieved through annealing of zinc-alkoxide (“zincone”-like) layers obtained by plasma-enhanced atomic layer deposition (PE-ALD). The zincone-like layers are deposited through sub-saturated PE-ALD adopting diethylzinc and O 2 plasma with doses below self-limiting values. Nanoporous ZnO thin films were subsequently obtained by calcination of the zincone-like layers between 100–600 °C. Spectroscopic ellipsometry (SE) and X-ray diffraction (XRD) were adopted in situ during calcination to investigate the removal of carbon impurities, development of controlled porosity, and forma- tion and growth of ZnO crystallites. The layers developed controlled nanoporosity in the range of 1–5%, with pore sizes between 0.27 and 2.00 nm as measured with ellipsometric porosimetry (EP), as a function of the plasma dose and post-annealing tempera- ture. Moreover, the crystallinity and crystallite orientation could be tuned, ranging from a powder-like to a (100) preferential growth in the out-of-plane direction, as measured by synchrotron-radiation grazing incidence XRD. Calcination temperature ranges were identified in which pore formation and subsequent crystal growth occurred, giving insights in the manufacturing of nanoporous ZnO from Zn-based hybrid materials.